@book{26986,
	author = {Gardner, J. W.  and Varadner, Vijay K.Awadelkarim, Osama O.},
	title = {Microsensors, Mems, And Smart Devices},
	publisher = {Wiley},
	year = {2013},
	address = {Delhi},
	note = {MicrosensorsSmart DevicesMEMS}
}