TY  - BOOK
AU  - Gardner, J. W. 
AU  - Varadner, Vijay K.Awadelkarim, Osama O.
TI  - Microsensors, Mems, And Smart Devices
SN  - 9788126540822
U1  - 621.3815 
PY  - 2013///
CY  - Delhi
PB  - Wiley
KW  - Electronics and Communication Engineering
N1  - MicrosensorsSmart DevicesMEMS
ER  -