000 00605 a2200205 4500
000 BKB
001 137843
005 20200902153324.0
008
020 _a9781420090529
082 _a620.115
_bC11N
100 1 _aNanofabrication handbook
245 1 _aNanofabrication handbook
_cedited by Stefano Cabrini and Satoshi Kawata
260 _aBoca Raton
_bCRC Press
_c2012
300 _a518p.
630 _aPhysics
690 _aNanostructured materials; Nanostructures
700 _aCabrini, Stefano ed.
_b
_c
700 _aKawate, Satoshi ed.
_b
_c
999 _c10758
_d10758