000 00494nam a2200169Ia 4500
008 240827s9999 xx 000 0 und d
020 _a9788126540822
082 _a621.3815
_bG17M
100 _aGardner, J. W.
245 0 _aMicrosensors, Mems, And Smart Devices
260 _aDelhi
_bWiley
_c2013
300 _axi,503p.
500 _aMicrosensorsSmart DevicesMEMS
650 _aElectronics and Communication Engineering
700 _aVaradner, Vijay K.Awadelkarim, Osama O.
942 _cBK
999 _c26986
_d26986