| 000 | 00651 a2200193 4500 | ||
|---|---|---|---|
| 001 | 131946 | ||
| 003 | OSt | ||
| 005 | 20211006145120.0 | ||
| 008 | |||
| 082 |
_a621.366 _bL33L |
||
| 245 | 1 |
_aLaser precision microfabrication _cedited by Koji Sugioka, Michel Meunier and Alberto Piqué |
|
| 260 |
_aHeidelberg _bSpringer _c2010 |
||
| 300 | _a344p. | ||
| 690 | _aMicrofabrication; Lasers--Industrial applications; Manufacturing processes; Nanotechnology; Photonics; Physics; Laser | ||
| 700 |
_aSugioka, Koji _eEditor |
||
| 700 | 1 |
_aMeunier, Michel _eEditor |
|
| 700 | 1 |
_aPiqué, Alberto _eEditor |
|
| 942 |
_2ddc _cBK |
||
| 999 |
_c6336 _d6336 |
||