000 00651 a2200193 4500
001 131946
003 OSt
005 20211006145120.0
008
082 _a621.366
_bL33L
245 1 _aLaser precision microfabrication
_cedited by Koji Sugioka, Michel Meunier and Alberto Piqué
260 _aHeidelberg
_bSpringer
_c2010
300 _a344p.
690 _aMicrofabrication; Lasers--Industrial applications; Manufacturing processes; Nanotechnology; Photonics; Physics; Laser
700 _aSugioka, Koji
_eEditor
700 1 _aMeunier, Michel
_eEditor
700 1 _aPiqué, Alberto
_eEditor
942 _2ddc
_cBK
999 _c6336
_d6336